JPH0648850Y2 - キャリヤピッチ変換装置 - Google Patents
キャリヤピッチ変換装置Info
- Publication number
- JPH0648850Y2 JPH0648850Y2 JP14678188U JP14678188U JPH0648850Y2 JP H0648850 Y2 JPH0648850 Y2 JP H0648850Y2 JP 14678188 U JP14678188 U JP 14678188U JP 14678188 U JP14678188 U JP 14678188U JP H0648850 Y2 JPH0648850 Y2 JP H0648850Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- semiconductor wafer
- support
- pitch
- columns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 56
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 48
- 239000011295 pitch Substances 0.000 description 25
- 238000000034 method Methods 0.000 description 15
- 230000008569 process Effects 0.000 description 10
- 239000000969 carrier Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000002716 delivery method Methods 0.000 description 3
- 238000001125 extrusion Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 239000012050 conventional carrier Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14678188U JPH0648850Y2 (ja) | 1988-11-09 | 1988-11-09 | キャリヤピッチ変換装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14678188U JPH0648850Y2 (ja) | 1988-11-09 | 1988-11-09 | キャリヤピッチ変換装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0267644U JPH0267644U (en]) | 1990-05-22 |
| JPH0648850Y2 true JPH0648850Y2 (ja) | 1994-12-12 |
Family
ID=31416589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14678188U Expired - Lifetime JPH0648850Y2 (ja) | 1988-11-09 | 1988-11-09 | キャリヤピッチ変換装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648850Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2564708Y2 (ja) * | 1991-09-20 | 1998-03-09 | 東京応化工業株式会社 | ウェハーの移載装置 |
| JP2584806Y2 (ja) * | 1992-10-13 | 1998-11-11 | 株式会社ディスコエンジニアリングサービス | フレーム挿入補助治具 |
-
1988
- 1988-11-09 JP JP14678188U patent/JPH0648850Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0267644U (en]) | 1990-05-22 |
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